MEMS, the acronym of "Micro Electro Mechanical Systems", are generally considered
as micro systems consisting of micro mechanical sensors, actuators and microelectronic circuits
integrated in a single chip. Micro means one millionth (1/1000000). A thickness of a human
hair is 100 times than that of a micron [1]. This means that it is an extremely small value
and so its fabrication needs to be taken intensive care of.
As microelectronics is a well-developed technology, the research and development of MEMS is
concentrated on the research and development of micro mechanical
sensors and actuators, or micro electromechanical transducers.
